회사소개

사업분야

고객센터

인재채용

사업분야

  • 사업분야
  • 반도체

반도체

제품소개 (반도체 생산설비 부품)-Single
Wafer 8” & 12”
  • - Process : PR-Strip, Etching, High temp SPM... etc
  • - Use chemical : HF, SPM, SC-1, H3PO4, SOLVENT, DIO3... etc

  • Buffer

    User spec

  • Other

    - Chemical supply unit

    - PVC&Teflon bolt

    - Manual valve

    - Chuck pin

  • Exhaust Box

    PVC (Welding)

  • CHB Box

    PVC (Welding)

  • CUP (BOWL)

    PTFE, PP, PVDF

  • Bellows

    PTFE

  • Spin Chunk

    PTFE, PP, PVDF, PEEK, PVC

    ※ New Production & Overhaul
제품소개 (반도체 생산설비 부품)-Wet station
Wafer 8” & 12”
  • - Process : PR-Strip, Etching... etc
  • - Use chemical : HF, SPM, SC-1, H3PO4, SOLVENT... etc

  • Wafer Chuck

    PEEK

  • Bath

    PTFE

  • Wafer Guide

    PEEK

  • Auto Cover

    HTPVC+Teflon

  • Guide

    User spec

  • Other

    - Chemical supply unit

    - PVC&Teflon bolt

    - Manual valve