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  • Equipment possession status

Equipment possession status

Equipment possession status
Exterior Image Equipment name
(manufacturer)		 Size
(processable size)		 Number of equipment
MCT 2 Units 4.5, 6 Units 6.5
1 Unit 7.5, 1 Unit 9.5		 10
DOOSAN 2500(W)*950(D)*800(H)
CNC 8", 10" 5
Φ600*300(L)
DOOSAN 15"
Φ830*1079(L)
Router 2600*1300 2
KOVA 2600(W)*1300(D)*80(H)
Current status of measuring instrument
NO. Image Product name Model name Number of equipment Example of use of measuring parts
① Vision meter LT3D QH4030 1
  • ◎ Measuring range
  • ▶ X: 400mm Y: 300mm Z: 150mm
  • ◎ Wafer Handling point check.
  • ▶ Wafer chuck, Wafer guide, Chuck pin, Hole etc.
② Illuminance meter SJ-310 1
  • ◎ Measuring range
  • ▶ 360um(-200um~-160um)
  • ◎ Range/Resolution
  • ▶ 360um/0.02um
  • ▶ 100um/0.006um
  • ▶ 25um/0.002um
  • ◎ Key parts check.
  • ▶ CUP (BOWL) and other surface roughness management parts
③ 3D measuring instrument MERLIN1400 1
  • ◎ Measuring range
  • ▶ X: 1400mm Y: 1500mm Z:1000mm
  • ◎ Maker: Dukin Co,.Ltd(Korea)