Business areas

  • Business areas
  • Semiconductor

Semiconductor

Product Introduction (Semiconductor Production Equipment Parts)-Single
Wafer 8” & 12”
  • - Process : PR-Strip, Etching, High temp SPM... etc
  • - Use chemical : HF, SPM, SC-1, H3PO4, SOLVENT, DIO3... etc

  • Buffer

    User spec

  • Other

    - Chemical supply unit

    - PVC&Teflon bolt

    - Manual valve

    - Chuck pin

  • Exhaust Box

    PVC (Welding)

  • CHB Box

    PVC (Welding)

  • CUP (BOWL)

    PTFE, PP, PVDF

  • Bellows

    PTFE

  • Spin Chunk

    PTFE, PP, PVDF, PEEK, PVC

    ※ New Production & Overhaul
Product introduction (semiconductor production equipment parts) - Wet station
Wafer 8” & 12”
  • - Process : PR-Strip, Etching... etc
  • - Use chemical : HF, SPM, SC-1, H3PO4, SOLVENT... etc

  • Wafer Chuck

    PEEK

  • Bath

    PTFE

  • Wafer Guide

    PEEK

  • Auto Cover

    HTPVC+Teflon

  • Guide

    User spec

  • Other

    - Chemical supply unit

    - PVC&Teflon bolt

    - Manual valve